The nanoFAB is a centralized open-access facility specializing in micro- and nanoscale fabrication and characterization, with over $84 million invested in equipment and infrastructure. Spanning 25,000 sq ft, it houses over 200 pieces of equipment and offers comprehensive capabilities in microscopy, spectroscopy, material analysis, lithography, thin-film deposition, and etching. The facility supports the fabrication of MEMS, sensors, microfluidics, and photonics, with advanced processing capabilities for 4″ (100 mm) and 6″ (150 mm) wafers.